I rollback ex3200 to jinstall-ex-3200-13.2X51-D35.3-domestic-signed.tgz (it's not avalible now, but I have saved package), it's work correctly
and run on ex2200 - 15.1R6 - https://www.juniper.net/support/downloads/?p=ex2200#sw - it's present on avalible versions
but, on 2200 I have only 10mb free space =((