That's working configuration from my servers (Centos):
/etc/sysconfig/network-scripts/ifcfg-eth1.333
VLAN=yes DEVICE=eth1.333 PHYSDEV=eth1 TYPE=Ethernet BOOTPROTO=static ONBOOT=yes IPADDR=10.200.0.2 NETMASK=255.255.255.0
...and Ubuntu (a part from /etc/networking/interfaces):
auto vlan3004 iface vlan3004 inet static address 10.10.12.5 netmask 255.255.255.248 vlan_raw_device eth0 up route add -net 10.16.0.0 netmask 255.255.255.224 gw 10.10.12.2